Comet 3 Station Back to Back

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Features

  • Using Comet 3 station BTB is the easy way to transfer 25 wafers face to face (or back to back).
  • Proximity or same slot process.
  • The best mass transfer system for a safe back to back transfer.
  • Adapted for Solid Source, WET or LTO process.
  • This Comet is Fast, clean, reliable and accurate.
  • Customized for your different boats and carriers.
  • Compatible with your communication requirements and other manufacturer's processing equipment.
  • 3” / 4” / 5” / 6” / 8” wafer capability
  • Easy way to transfer 25 wafers Face to Face (or Back to Back)
  • The best mass transfer system for a safe Face to Face (or Back to Back) transfer