Comet 3 Station Back to Back
產品查詢Features
- Using Comet 3 station BTB is the easy way to transfer 25 wafers face to face (or back to back).
- Proximity or same slot process.
- The best mass transfer system for a safe back to back transfer.
- Adapted for Solid Source, WET or LTO process.
- This Comet is Fast, clean, reliable and accurate.
- Customized for your different boats and carriers.
- Compatible with your communication requirements and other manufacturer's processing equipment.
- 3” / 4” / 5” / 6” / 8” wafer capability
- Easy way to transfer 25 wafers Face to Face (or Back to Back)
- The best mass transfer system for a safe Face to Face (or Back to Back) transfer
