What is FOUP?
FOUP is an acronym for Front Opening Unified Pod or
Front Opening Universal Pod. It is a specialized plastic
enclosure designed to hold silicon wafers securely and
safely in a controlled environment, and to allow the
wafers to be transferred between machines for
processing or measurement.
FOUPs were designed
with the constraints of 300mm in mind, with the
removable cassette being replaced by fins in the FOUP
which hold the wafers in place, and the bottom
opening door being replaced by a front opening door
to allow robot handling mechanisms to access the
wafers directly from the FOUP.
FOUPs are available in
several colors, depending on the customers wish.
FOUPs and IC manufacturing equipment can have a
nitrogen atmosphere, in an effort to increase device
yield.
FOUP cleaner can improve yield by reducing FOUP contaminations.
- Remove particles
- Reduce humidity
- Reduce AMC
- Low cross-contamination
MYFC S500 SEMI-AUTO Specifications:
- Manual load FOUP and auto clean
- DIW clean/Hot N2 dry/IR dry
- Rotation cleaning
- Equipment Class 100
- DIW heating System
- ESD and humidity control
- HEPA
- Detergent clean*
- SUS316 chamber for better architecture
- Ceramics Bearing for rust-free
- Low vibration during high speed rotation
- Recipe easy maintenance and more options
- Pump with higher durability
- CDA for drying process
- Single /dual open
- Clean 8 sets of 12” FOUP/FOSB
- Customized basket for cleaning variated instrument
- EMO stop
- Customized Signal tower
