Wafer Handling System
製品のお問い合わせ
The use of clean organic materials, patented vacuum tip design and true ESD protection provides a unique system with the highest levels of cleanliness and safety.
All parts of Vacuum Handling System are interchangeable. They can be configured or upgraded to meet the specific end-user requirements.
Features:
- Manual solution for single wafer handling
- True ESD protection
- Manufactured from clean organic materials
- Vacuum wand normally open
- Raised vacuum surface to minimize contact
- Support ribs prevents wafer deformation
- Reinforced vacuum tube prevents vacuum loss
- All parts of Vacuum Handling System are interchangeable and upgradable to meet specific requirements
Specifications:
| Product Code | Description | Specifications |
| DYC950-HW-02-TIP-8-EP-0 | PEEK TIP FOR 6” & 8” WAFERS | PEEK + CF |
| DYC950-HW-02-TIP-8-EP-30 | PEEK TIP FOR 6” & 8” WAFERS, Ext 30° | PEEK + CF |
| DYC950-HW-02-TIP-12-EP-0 | PEEK TIP FOR 12” WAFERS | PEEK + CF |
| DYC950-HW-02-TIP-12-EP-30 | PEEK TIP FOR 12” WAFERS, Ext 30° | PEEK + CF |
| DYC950-HW-02-BERNOULLI-WAND-8-MC | 8” Bernoulli Wand | Micro-Contact |
| DYC950-HW-02-BERNOULLI-WAND-8-NC | 8” Bernoulli Wand | Non-Contact |
| DYC950-HW-02-STAND-8-ESD | 8” Vacuum Pen Holder | ESD-Safe |
| DYC950-HW-02-STAND-12-ESD | 12” Vacuum Pen Holder | ESD-Safe |
| DYC950-HW-02-WAND-8 | 4”- 8” NORMALLY OPEN WAND | ESD-Safe |
| DYC950-HW-02-WAND-12 | 12” NORMALLY OPEN WAND with Switch | ESD-Safe |
| DYC950-HW-02-COIL-TUBE-ESD | Coil 300mm | ESD-Safe |
| DYC950-HW-02-VP-65K | Vacuum Pump (65kPa) for Up To 8” Wafers | 4” - 8”, ≤65kPa |
| DYC950-HW-02-VP-85K | Vacuum Pump (85kPa) for Up To 12” Wafers | 8” - 12”, ≤85kPa |
| DYC950-HW-02-VPSET-85K | Vacuum Pump with Digital Gauge (85kPa) for Up To 12” Wafers | 8” - 12”, ≤85kPa |
