MC8, MC6 & 300mm Wafer Frame Metal Cassettes
製品のお問い合わせMetal Cassettes offer cost effective solutions for thermal processes applications.
Made of a special aluminum alloy (Fortal HR), they guarantee high mechanical performances with an optimized weight. A very hard and thick anodization of A1203 is grown onto the Fortal HR to prevent scratches and metal contamination.
- High back plate for wafer protection
- Up to 400ºC process compliant
- Ergonomic handles for ease of use and prevent contamination
- Minimized wafers masking
- MC8 – Dimensions (wdh) 213 x 240 x 225 mm
- MC6 – Dimensions (wdh) 163 x 143 x 165 mm
- ESD Protection
- High back plate for wafer protection
- Up to 400ºC process compliant
- Ergonomic handles for ease of use and prevent contamination
- Minimized wafers masking
- Dimensions (wdh) 412 x 312 x 339 mm
- Weight: 5 kg
- ESD protection
- Infopad & clamp function available offering full compatibility with SEMI E15.1 and handling with Load Ports, PGV
