製品

RWMAP is a map driven inspection system for semiconductor wafers. It is composed by a motorized microscope XY and Theta stage, an inspection camera, a control system and a state-of-the-art graphical software.

• Motorized X/Y/R precision stage for semiconductor microscopes
• Image acquisition system and advanced inspection software
• Wafer map identification, dice inspection, and BINCODE modification
• Picture storage, high-resolution measurements, and wafer scanning
• Semi M12-M13 OCR reader, wafer identification, and powerful inspection tools
• Sequential or direct dice access, programmed paths, and sampling strategies
• Inspection at all process phases, from substrate control to back-end
• Precise measurement and image documentation system
• Configurable functions for diverse working environments
• Compatibility with SEMI map formats and adaptable to different maps
  

Specifications:

• Three axes, motorized microscope stage. X,Y and R, resolution 1m and <0.01° · PC based motion controller
• High resolution camera
• 23” high resolution monitor
• Inspection modes: single die direct access, sequential scan, free, statistical sampling, programmed paths
• User defined scan filters (all dice, only GOOD dice, only FAIL dice or bin code defined filters)
• Complete bin code management
• Map type according to SEMI standard, custom formats on request · Map download/upload through LAN or locally
• Autofocus for Leica DM8000/12000 · On screen measurement functions · Optional ID OCR reader
• Optional SECS-II HSMS and GEM interfacing