製品 > SIL8000 Wafer Loader - Dou Yee Enterprises

Automatic loading system for silicon wafers, paired with other inspection microscopes. SIL8000 loader is based on a PC system with a user-friendly touchscreen interface.

Its software has recipe management to easily switch between different wafer sizes and thicknesses and features different wafer selection methods to cover any inspection need. The immediate wafer access and selection make the system extremely easy and friendly to use.

Features:

Optional macro inspection capability
Compatibility with 150 mm and 200 mm wafers without mechanical adjustments
Auto-recipe tool for easy cassette profile configuration
Default safety features: laser mapping, cross-slot detection, wafer protrusion
Efficient and reliable wafer handling with carbon fiber end effector
Optional features: LED illuminator, microscope rotating chuck with auto-zero return for carrier protection

Specifications:

Wafer Thickness	• 250μm - 750 μm (Standard) • Other thickness on request	Throughput	• Up to 400 Wafers per Hour • 200 Wafers per Hour with EE Rotation
Wafer Size	• 4ʺ, 5ʺ, 6ʺ, 8ʺ • Handles two wafer sizes on the same machine	Environment	• Class ISO4 (ISO EN14644) • CE Mark • SEMI Standard Compliant
Wafer Types	• Silicon (Si) • Lithium Niobate (LiNbO3) • Gallium Arsenide (GaAs) • Germanium (Ge) • Sapphire (Al2O3) • Glass • Silicon Carbide (SiC) • Other semiconductor Substrates	Safety Features	• Cross-slot Detection • Laser Mapping with Wafer Thickness and Distance Measurement • Wafer Protrusion Alarm • Faults Detec􀆟on (Electrical, Vacuum, Air)
User Interface	• Windows 7 • 8” TFT Touch Screen	Networking	• SMB (Windows Networking) • SECS-GEM (Option)
Communication Ports	• Ethernet • USB	Footprint	• 430 (W) x 650 (D) mm
Handling	• High-reliability Carbon Fiber End Effector • Cassette laser mapping	Options	• Bright light Inspection Lamp • Rotating Microscope Chuck • Motorized End Effector Rotation
Inspection Modes	• All Wafers • Selected • Random Selected • Statistical Mode	Accessories	• Vibration Insulated Table • Thin Wafer Handling Kit