Micro Differential Pressure Sensor
製品のお問い合わせDesign for EFEM to monitor air flow speed/volume. It help AMC system to remove particle and VOC.
Features:
- Tiny dimension
- High sensitivity and repeatability
- Scenario: EFEM or AMC cleaning equipment
Design for EFEM to monitor air flow speed/volume. It help AMC system to remove particle and VOC.
Features: