RWMAP – Map Driven Inspection Software System
Product EnquiryRWMAP is a map driven inspection system for semiconductor wafers. It is composed by a motorized microscope XY and Theta stage, an inspection camera, a control system and a state-of-the-art graphical software.
Features:
- Motorized X/Y/R precision stage for semiconductor microscopes
- Image acquisition system and advanced inspection software
- Wafer map identification, dice inspection, and BINCODE modification
- Picture storage, high-resolution measurements, and wafer scanning
- Semi M12-M13 OCR reader, wafer identification, and powerful inspection tools
- Sequential or direct dice access, programmed paths, and sampling strategies
- Inspection at all process phases, from substrate control to back-end
- Precise measurement and image documentation system
- Configurable functions for diverse working environments
- Compatibility with SEMI map formats and adaptable to different maps
Specifications:
- Three axes, motorized microscope stage. X,Y and R, resolution 1m and <0.01° · PC based motion controller
- High resolution camera
- 23” high resolution monitor
- Inspection modes: single die direct access, sequential scan, free, statistical sampling, programmed paths
- User defined scan filters (all dice, only GOOD dice, only FAIL dice or bin code defined filters)
- Complete bin code management
- Map type according to SEMI standard, custom formats on request · Map download/upload through LAN or locally
- Autofocus for Leica DM8000/12000 · On screen measurement functions · Optional ID OCR reader
- Optional SECS-II HSMS and GEM interfacing
