Inline Multi-Channel Liquid Particle Counter
Product Enquiry
Comprehensively grasp micronavid particle data and establish a complete production line operation history
Product Features:
- Direct integration into operating machines
- Automated multi-point analysis
- Monitor the number of micro and nanoparticles 24 hours a day
- Reduce ineffective movement and improve the efficiency of the cleaning process
- Cost savings of up to 72% per year can be achieved
- Developers, acid-mixed photoresist solutions, copper/aluminic acid, and DI water have good detection effects
Advantages:
Detect Predicition
Automatic warning, micro and nanoparticles appear micro-pollution conditions, cleanliness up to the warning standard, can be replaced in advance of the filter, to prevent the product condition
Optimize Recommendations
Intelligent cross-comparison of filter size, life, maintenance interval, and evaluation of process cleanliness. and provide optimization recommendations
Establish stable process standards
The cleanliness of the production line machine maintains a stable process standard to ensure that this process does not become a part of the customer's highlight
Semiconductor industry-wide applications:
Wafer Fabrication & Encapsulation Testing
| Product Advantages | Product Application | Import Customers |
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Specifications:
| Measurement Range | 0.1 μm - 50 μm |
| Permissible Margin of Error | 40000 counts/ml @ 5% Coincidence Error |
| Correction | Traced back to NIST |
| Communication Mode | RS485/Modbus, 4~20 mA |
| Outer Box / Line / Sampling Interface | Non-grit Steel / PFA / quartz |
| LED Light Indication | Power/ Fault/ Normal Sampling/ Exception Warning |
| Sampling Temperature / Pressure | 0-70°C / 150 PSI |
