6" & 8" Standalone Sorter
製品のお問い合わせStandards are as follows
- Full SEMI Compliance
- Full CE Compliance
- SEMI Standard Safety
- Dual End Effector for maximum throughput
- Cassette Presence Indicators
Options
- SMIF 200mm
- SMIF and open (on same tool) 200mm
- FOUP, Fosb, open cassette 300mm
Specifications
| Specifications |
| From 2 to 4 load ports |
| Front & back scribe reading |
| Database recipes, manual drag & drop Gem-Secs II remote control |
| Compatible thin wafers, vacuum or edge contact |
| 600 WPH cassette to cassette transfer |
| 350 WPH with align and OCR |
| Class 1 cleanliness = 0.8 particles at 0.12 µm |
| Cassette Mapping |
| OCR:M12, M13 Barcode, T7 |
| Intuitive Software User Interface: Split, Merge, Wand Functions |
