Applications:
Processes
| Model LPCVD | Model ATMOSPHERIC | Model PECVD | Model ALD |
| Poly | Wet Oxidation | Nitride ARC | AIOx |
| P/N Doped Poly | Dry Oxidation | Nitride CAP | - |
| Nitride | Annealing | - | - |
| Low stress Nitride | BBR3 | - | - |
| TEOS | POCl3 | - | - |
| LTO | Sintering | - | - |
| SIPOS | Alloy | - | - |
| - | H2 Annealing | - | - |
