Products

The Model 5635 AeroBar MP ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644 Class 1 (0.1 mm particles) cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances. 

MP technology is easy to adjust and features the ability to fine-tune voltage, frequency and balance to meet differing environmental and product sensitivity requirements. The 5635 AeroBars come with 50 mm spacing for emitters for lengths ≤600 mm for the most dense, uniform ionization coverage.

    

Features:

• ISO 14644-12 (0.01 µm particles) cleanliness
• Modulated pulse technology
• Excellent lateral uniformity
• Low field voltages
• Air-assist capability
• Optional software with easy-to-use interface with wide adjustability
• Alarm output signal

Benefits:

• Compatible with all wafer technology nodes including 14 nm and below
• Precision balance, high ion output with long-term stability
• Uniform balance across the AeroBar
• Safe placement as close as 150 mm of the wafer or reticle
• Enhanced static charge neutralization at fast automation speeds
• Fast setup and easy optimization in any environment 
• Communicate to tool or facility monitoring system
  
   

Specifications:

5635
Input Voltage	24 VDC ± 10%
Output Voltage	13.5 kV p-p (max), adjustable
Distance	150 - 1000 mm distance to surface; application & customer specification dependent
Frequency	Default setting at 5 Hz; adjustable from 1-33 Hz
Balance	Auto balancing system <±20V over time and across the bar length (measured in a controlled  environment at 24" distance)
Ion Emission	Modulated pulse (MP) technology
Emitter Points	Single crystal silicon emitter points
Emitter Pitch	50 mm or 75 mm spacing between nozzles; 50 mm spacing only on the 450 mm and 600 mm lengths
Air Supply	Clean dry air (CDA) or nitrogen
Airflow	45 psi mac gas pressure; 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting (optional)
Ionization   Performance	15 sec (typ) with no air-assist, Vp-p Swing of 80 Vp-p; measured at 24" below an emitter center   group of points
Cleanliness	Meets ISO 14644-12 cleanliness (0.01 µm particles or nanoparticles) and ISO 14644   Class 1 (0.1 µm particles) using 45-50%
Ozone	< 0.05 ppm
EMI	Below background level
Operating Env.	Temperature 15-35ºC (59-95ºF); humidity 30-60% RH, non-condensing
Bar Settings	DIP switches for general power settings; trimpots for fine tuning balance, frequency, and power output   or use the serial output to the MP 5635 Bar Control software for fine adjustments
Enclosure	ABS chasis, stainless steel rails on the outside of the bar
Dimensions	3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in. (78H x 34W x 450/600/850/1000/1150/  1300/1450/1600/1750/1900/2050/2200/2350L mm)
Certifications

Model 5601 Power Distribution Box
Input Voltage	24 VDC for each bank of 4 bars; 5.6A total (0.7A max/port)
Communication	Ethernet (RJ-45) to/from PC; individual bar standby inputs
Alarm Output	Relay closure to ground
Output	8 RJ-45 ports (1 for each 5635 bar)
LED Indicators	Green PWR, Yellow COM, Red ALM, Blue USB
Weight	15 oz (420g)
Dimensions	1.2 H x 6.3L x 3.6W in (3.1H x 16.0L x 9.2W cm)
Certifications

Simple Installation
The Model 5635 ionizing bar is quickly installed by simply plugging into a 24 VDC source and connecting an air line, (if air-assist is desired). Set the DIP switches for general power levels as defined in the user’s manual to activate factory settings for a base discharge performance. Users can then fine-tune the control parameters from the bar or through the easy to use software GUI for installations where optimized balance, swing voltage and discharge times are desired. An alarm connection in the Signal and Power Junction Box enables a signal output to the tool or central computer for FMS monitoring.

Power Distribution Box (optional)
The Model 5601 Power Distribution Box can be used to centralize power and software control for up to 8 MP AeroBars.

ISO Class 1 for 0.1 and 0.01 Micron Particles
ISO 14644-1 (1999) establishes 9 particulate class limits. A class is met when airborne particles-per-cubic-meter (or particles-per-cubic-foot) do not exceed the class limit. The following graph summarizes the class limit lines for particles between 0.1 micron and 5 microns.

 

       

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